Microstructure and 355 nm Laser-Induced Damage Characteristics of Al2O3 Films Irradiated with Oxygen Plasma under Different Energy

Al2O3 films were prepared using electron beam evaporation at room temperature. The samples were irradiated with oxygen plasma under different energy. The variations in average surface defect density and root mean square (RMS) surface roughness were characterized using an optical microscope and an atomic force microscope. Surface average defect density increased after plasma treatment. The RMS surface roughness of the samples decreased from 1.92 nm to 1.26 nm because of surface atom restructuring after oxygen plasma conditioning. A 355 nm laser-induced damage experiment indicated that the as-grown sample with the lowest defect density exhibited a higher laser-induced damage threshold (1.12 J/cm) than the other treated samples. Laser-induced damage images revealed that defect is one of the key factors that affect laser-induced damage on Al2O3 films.